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Cho-Wei Chang, Han-Ming Chow, Yung-Chun Lee and Ray-Quan Hsu, “Fabricating Large-area Sub-Micrometer Patterned Sapphire Substrates for Light-Emitting diodes by Metal Embedded Photo-mask Photolithography”, The 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (2013 ASPEN), Nov. 12-15, Taipei, Taiwan (2013).
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