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Cho-Wei Chang, Han-Ming Chow, Yung-Chun Lee and Ray-Quan Hsu, “Metal Embedded Soft Photo-mask Photolithography for Fabrication Large-Area Patterned Sapphire Substrates at Sub-Micrometer Scale in Light-Emitting Diode Industry ”, The 15th International Conference on Precision Engineering(ICPE 2014), July 22-25, 2014, Kanazawa city, Ishikawa, Japan(2014).
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